On May 12, 2024, YUWEITEK's first mask substrate defect detection product Halo-100 was successfully shipped in YUWEITEK and successfully delivered to the domestic advanced mask factory.

As the second product of YUWEITEK's "Mask life cycle quality control" product line, the Halo-100 device independently developed by YUWEITEK relies on YUWEITEK's rich experience and technical reserves accumulated over the years in the field of mask detection, and is based on high-precision optical system, high-stability motion table system and high-cleanliness environmental control and transmission system. In combination with YUWEITEK's proprietary algorithm and software system, the demand for mask substrate (blank) defect detection has been successfully realized, and the application field of mask inspection has been extended to the inspection of incoming materials in mask factory and the control inspection of the whole process of mask substrate factory.

In the maskshop, the Halo-100 device can be used for incoming material inspection to detect defects before the mask is exposed, thereby effectively avoiding the internal contamination of the exposure machine cavity, while preventing the mask with contamination from continuing to the subsequent process after exposure, reducing the customer's yield loss. In addition, the device can also be used as a measuring scale of the particle monitor of production equipment such as exposure machines, and regularly monitor the internal cleanliness of production equipment. In addition, the automatic box opening/automatic reversion module equipped with the Halo-100 equipment greatly reduces the secondary pollution caused by manual intervention, ensuring that the mask from the mask box to the exposure machine is zero pollution.

In the mask substrate shop, the Halo-100 device can be used for incoming glass substrate inspection, multi-layer coating process inspection and finished product shipment inspection, helping customers monitor cleanliness at each process node.

The launch of Halo-100 further improves YUWEITEK's layout in the "mask life cycle quality control" product line, and forms a one-stop mask zero defect detection supervision and quality control closed-loop with i6R and Raptor products. In the future, YUWEITEK will continue to increase investment in research and development, accurately grasp customer needs, continue to introduce new products to meet customer needs, fill the gaps in the field of domestic related semiconductor equipment, and create more value for our customers.